Novel EUV resist materials for 7 nm node and beyond
| Autor: | Hohle, Christoph K., Gronheid, Roel, Furutani, Hajime, Shirakawa, Michihiro, Nihashi, Wataru, Sakita, Kyohei, Oka, Hironori, Fujita, Mitsuhiro, Omatsu, Tadashi, Tsuchihashi, Toru, Fujimaki, Nishiki, Fujimori, Toru |
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| Zdroj: | Proceedings of SPIE; March 2018, Vol. 10586 Issue: 1 p105860G-105860G-9, 952750p |
| Databáze: | Supplemental Index |
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