Ultimate edge-placement control using combined etch and lithography patterning optimizations
| Autor: | Hohle, Christoph K., Gronheid, Roel, Peterson, Brennan, Wise, Rich, van der Straten, Koen, Viantka, Katja, Luca, Melisa, Mokhlespour, Salman, Kubis, Michael, Cattani, Giordano, Hellin, David, Sobieski, Daniel, Dixit, Girish, Shamma, Nader, Rutigliani, Vito, Jaenen, Patrick, Halder, Sandip, Leray, Philippe |
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| Zdroj: | Proceedings of SPIE; March 2018, Vol. 10586 Issue: 1 p105860A-105860A-8, 952749p |
| Databáze: | Supplemental Index |
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