Atomic force microscopy on cross-sections of optical coatings: a new method

Autor: Duparré, Angela, Ruppe, Carsten, Pischow, Kaj A., Adamik, Miklós, Barna, P.B.
Zdroj: Thin Solid Films; June 1995, Vol. 261 Issue: 1-2 p70-75, 6p
Abstrakt: Two methods are described of preparing and investigating cross-sections of single layer and multilayer optical coatings by atomic force microscopy (AFM). The first consists of mechanical grinding and polishing followed by a final ion-polishing and etching procedure. The second is simply mechanically fracturing. The results obtained from both preparation methods are compared. In addition, cross-sectional transmission electron microscopy has been used to verify the AFM results.
Databáze: Supplemental Index