Validation of mathematical model for CZ process using small-scale laboratory crystal growth furnace

Autor: Bergfelds, Kristaps, Sabanskis, Andrejs, Virbulis, Janis
Zdroj: IOP Conference Series: Materials Science and Engineering; May 2018, Vol. 355 Issue: 1 p012004-012004, 1p
Abstrakt: The present material is focused on the modelling of small-scale laboratory NaCl-RbCl crystal growth furnace. First steps towards fully transient simulations are taken in the form of stationary simulations that deal with the optimization of material properties to match the model to experimental conditions. For this purpose, simulation software primarily used for the modelling of industrial-scale silicon crystal growth process was successfully applied. Finally, transient simulations of the crystal growth are presented, giving a sufficient agreement to experimental results.
Databáze: Supplemental Index