Comparative stochastic process variation bands for N7, N5, and N3 at EUV
| Autor: | Goldberg, Kenneth A., Felix, Nelson M., Vaglio Pret, Alessandro, Graves, Trey, Blankenship, David, Bai, Kunlun, Robertson, Stewart, De Bisschop, Peter, Biafore, John J. |
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| Zdroj: | Proceedings of SPIE; March 2018, Vol. 10583 Issue: 1 p105830K-105830K-11, 10477182p |
| Databáze: | Supplemental Index |
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