Measurement of pattern roughness and local size variation using CD-SEM: current status
| Autor: | Ukraintsev, Vladimir A., Adan, Ofer, Fukuda, Hiroshi, Kawasaki, Takahiro, Kawada, Hiroki, Sakai, Kei, Kato, Takashi, Yamaguchi, Satoru, Ikota, Masami, Momonoi, Yoshinori |
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| Zdroj: | Proceedings of SPIE; March 2018, Vol. 10585 Issue: 1 p105850H-105850H-11, 10479162p |
| Databáze: | Supplemental Index |
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