Optimization of H2thermal annealing process for the fabrication of ultra-low loss sub-micron silicon-on-insulator rib waveguides
| Autor: | Reed, Graham T., Knights, Andrew P., Bellegarde, Cyril, Pargon, Erwine, Sciancalepore, Corrado, Petit-Etienne, Camille, Lemonnier, Olivier, Ribaud, Karen, Hartmann, Jean-Michel, Lyan, Philippe |
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| Zdroj: | Proceedings of SPIE; February 2018, Vol. 10537 Issue: 1 p1053706-1053706-10 |
| Databáze: | Supplemental Index |
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