Investigation of onium salt type photoacid generators in positive DUV resist systems
| Autor: | Cronin, Michael F., Adams, Timothy G., Fedynyshyn, Theodore H., Georger, Jacque H., Mori, J. Michael, Sinta, Roger F., Thackeray, James W. |
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| Zdroj: | Proceedings of SPIE; May 1994, Vol. 2195 Issue: 1 p214-224, 11p |
| Databáze: | Supplemental Index |
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