Chemical mechanical planarization for high precision optics
| Autor: | Batllo, Francois, Moeggenborg, Kevin, Lesiak, Stan, Salij, Roman |
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| Zdroj: | Proceedings of SPIE; May 2007, Vol. 10316 Issue: 1 p1031609-1031609-4 |
| Databáze: | Supplemental Index |
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