Update on optical material properties for alternative EUV mask absorber materials
| Autor: | Behringer, Uwe F.W., Finders, Jo, Scholze, Frank, Laubis, Christian, Luong, Kim Vu, Philipsen, Vicky |
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| Zdroj: | Proceedings of SPIE; June 2017, Vol. 10446 Issue: 1 p1044609-1044609-12 |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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