Direct formation of nanostructures by focused electron beam on a surface of thin metallic films

Autor: Martins Costa, Manuel Filipe P. C. M., Snikeris, Janis, Gerbreders, Vjaceslavs
Zdroj: Proceedings of SPIE; August 2017, Vol. 10453 Issue: 1 p104532B-104532B-6, 940795p
Databáze: Supplemental Index