Comparative Study of p-Type 4H-SiC Grown on n-Type and Semi Insulating 4H-SiC Substrates

Autor: Contreras, Sylvie, Konczewicz, Leszek, Arvinte, Roxana, Ben Messaoud, Jaweb, Wang, Tian Lin, Peyre, Hervé, Chassagne, Thierry, Zielinski, Marcin, Juillaguet, Sandrine
Zdroj: Materials Science Forum; May 2017, Vol. 897 Issue: 1 p275-278, 4p
Abstrakt: Comparative study of p-type 4H-SiC epitaxial layers grown simultaneously on two different 4H-SiC substrates, namely n-type and semi-insulating have been done by different structural, optical and electrical experimental techniques.
Databáze: Supplemental Index