Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity

Autor: Erdmann, Andreas, Kye, Jongwook, van Hoof, Bram, Holscher, Arjan, Gommers, Ralf, Cottaar, Jeroen, Raas, Marcel, Khalek, Samah, van Kemenade, Jan, Voncken, Maarten, de Graaf, Roelof, Oti, Elliot, Weichselbaum, Stefan, Droste, Richard, Lee, ByeongSoo, Chang, Chansam, Kang, Young Seog, Kim, Young Ha, Kong, Jeong-Heung, Jang, Jong Hoon, Nam, YoungSun, Hwang, Hyunwoo
Zdroj: Proceedings of SPIE; March 2017, Vol. 10147 Issue: 1 p101471A-101471A-8, 913248p
Databáze: Supplemental Index