Automated detection and classification of printing sub-resolution assist features using machine learning algorithms
| Autor: | Erdmann, Andreas, Kye, Jongwook, Kohli, Kriti K., Jobes, Mark, Graur, Ioana |
|---|---|
| Zdroj: | Proceedings of SPIE; March 2017, Vol. 10147 Issue: 1 p101470O-101470O-7, 913238p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|