Novel spin on planarization technology by photo curing SOC (P-SOC)
| Autor: | Hohle, Christoph K., Gronheid, Roel, Endo, Takafumi, Sakamoto, Rikimaru, Hashimoto, Keisuke, Saito, Daigo, Nishimaki, Hirokazu, Karasawa, Ryo, Tokunaga, Hikaru |
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| Zdroj: | Proceedings of SPIE; March 2017, Vol. 10146 Issue: 1 p1014625-1014625-7 |
| Databáze: | Supplemental Index |
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