Application of advanced hybrid metrology method to nanoimprint lithography
| Autor: | Sanchez, Martha I., Ukraintsev, Vladimir A., Osherov, Ilya, Issacharoff, Limor, Gedalia, Oram, Wakamoto, Koichi, Sendelbach, Matthew, Asano, Masafumi |
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| Zdroj: | Proceedings of SPIE; March 2017, Vol. 10145 Issue: 1 p101451X-101451X-7, 913067p |
| Databáze: | Supplemental Index |
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