SEM imaging capability for advanced nano-structures and its application to metrology
| Autor: | Sanchez, Martha I., Ukraintsev, Vladimir A., Suzuki, Makoto, Ikeda, Uki, Kasai, Yuji, Mizuhara, Yuzuru, Kishimoto, Takanori, Tachibana, Ichiro, Suzuki, Naomasa, Kawano, Hajime |
|---|---|
| Zdroj: | Proceedings of SPIE; March 2017, Vol. 10145 Issue: 1 p101451L-101451L-9, 913069p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|