Hybrid scatterometry measurement for BEOL process control
| Autor: | Sanchez, Martha I., Ukraintsev, Vladimir A., Timoney, Padraig, Vaid, Alok, Kang, Byeong Cheol, Liu, Haibo, Isbester, Paul, Cheng, Marjorie, Ng-Emans, Susan, Yellai, Naren, Sendelbach, Matt, Koret, Roy, Gedalia, Oram |
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| Zdroj: | Proceedings of SPIE; March 2017, Vol. 10145 Issue: 1 p1014506-1014506-8 |
| Databáze: | Supplemental Index |
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