Advanced surface affinity control for DSA contact hole shrink applications
| Autor: | Bencher, Christopher, Cheng, Joy Y., Delachat, Florian, Gharbi, Ahmed, Pimenta Barros, Patricia, Argoud, Maxime, Lapeyre, Céline, Bos, Sandra, Hazart, Jérôme, Pain, Laurent, Monget, Cédric, Chevalier, Xavier, Nicolet, Célia, Navarro, Christophe, Cayrefourcq, Ian, Tiron, Raluca |
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| Zdroj: | Proceedings of SPIE; April 2017, Vol. 10144 Issue: 1 p101440O-101440O-9, 912970p |
| Databáze: | Supplemental Index |
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