Compact 2D OPC modeling of a metal oxide EUV resist for a 7nm node BEOL layer
| Autor: | Panning, Eric M., Goldberg, Kenneth A., Lyons, Adam, Rio, David, Lee, Sook, Wallow, Thomas, Delorme, Maxence, Fumar-Pici, Anita, Kocsis, Michael, de Schepper, Peter, Greer, Michael, Stowers, Jason K., Gillijns, Werner, De Simone, Danilo, Bekaert, Joost |
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| Zdroj: | Proceedings of SPIE; April 2017, Vol. 10143 Issue: 1 p101431E-101431E-17, 10041687p |
| Databáze: | Supplemental Index |
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