Software for analysis of the process of formation of the catalytic mask in the off-electrode plasma
| Autor: | Andreev, Vladimir A., Bourdine, Anton V., Burdin, Vladimir A., Morozov, Oleg G., Sultanov, Albert H., Markushin, M. A., Kolpakov, V. A., Krichevskiy, S. V. |
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| Zdroj: | Proceedings of SPIE; April 2017, Vol. 10342 Issue: 1 p1034215-1034215-6 |
| Databáze: | Supplemental Index |
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