Evolution of structural properties of Si(001) subsurface layer containing He bubbles by low temperature annealing
| Autor: | Lukichev, Vladimir F., Rudenko, Konstantin V., Lomov, Andrey A., Shcherbachev, Kirill D., Chesnokov, Yury M., Kiselev, Dmitrii A., Miakonkikh, Andrew V. |
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| Zdroj: | Proceedings of SPIE; December 2016, Vol. 10224 Issue: 1 p1022424-1022424-10 |
| Databáze: | Supplemental Index |
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