A study of the vertical walls and the surface roughness GaAs after the operation in the combined plasma etching
| Autor: | Lukichev, Vladimir F., Rudenko, Konstantin V., Klimin, Viktor S., Solodovnik, Maxim S., Smirnov, Vladimir A., Eskov, Andrey V., Tominov, Roman V., Ageev, Oleg A. |
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| Zdroj: | Proceedings of SPIE; December 2016, Vol. 10224 Issue: 1 p102241Z-102241Z-4, 920174p |
| Databáze: | Supplemental Index |
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