A new flexible hybrid mask for contact exposure and its fabrication
| Autor: | Luo, Xiangang, Ye, Tianchun, Xin, Tingwen, Hu, Song, Hong, Minghui, Gu, Min, Liu, Xin, Zhang, Man, Cao, A-xiu, Pang, Hui, Wang, Jia-zhou, Deng, Qi-ling |
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| Zdroj: | Proceedings of SPIE; October 2016, Vol. 9685 Issue: 1 p96850Q-96850Q-6, 871657p |
| Databáze: | Supplemental Index |
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