Specification of Trace Metal Contamination for Image Sensors

Autor: Mertens, Paul W., Lavizzari, Simone, Guerrieri, Stefano
Zdroj: Diffusion and Defect Data Part B: Solid State Phenomena; September 2016, Vol. 255 Issue: 1 p309-312, 4p
Abstrakt: CMOS image sensors can suffer from background noise in absence of any light. In order to suppress this it is important to keep this noise, referred to as dark-current low. This implies that the internal generation current should be very low. Trace metal impurities have been reported to increase the generation current. In this study the trap-assisted generation current contributions due to 7 different metal impurities have been calculated. It was concluded that Cu and Mn impurities yield the highest generation current contribution.
Databáze: Supplemental Index