Improvement of unbalanced illumination induced telecentricity within the exposure slit
| Autor: | Erdmann, Andreas, Kye, Jongwook, Jang, Jonghoon, Lee, ByeongSoo, Kang, Young Seog, Chang, Chansam, Kong, Jeong-Heung, Kim, Young Ha, Bouman, Wim, de Graaf, Roelof, Weichselbaum, Stefan, Droste, Richard, de Boeij, Wim P., van Bussel, Bart, Neefs, Patrick, Rijke, Arij |
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| Zdroj: | Proceedings of SPIE; March 2016, Vol. 9780 Issue: 1 p97800X-97800X-5, 880206p |
| Databáze: | Supplemental Index |
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