Rapid development of high-volume manufacturing methods for epi-ready GaSb wafers up to 6” diameter for IR imaging applications
Autor: | Andresen, Bjørn F., Fulop, Gabor F., Hanson, Charles M., Miller, John L., Norton, Paul R., Gray, Nathan W., Prax, Andrew, Johnson, Daniel, Demke, Jonathan, Bolke, Joseph G., Alexander, W. B. |
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Zdroj: | Proceedings of SPIE; May 2016, Vol. 9819 Issue: 1 p981914-981914-11 |
Databáze: | Supplemental Index |
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