Rapid development of high-volume manufacturing methods for epi-ready GaSb wafers up to 6” diameter for IR imaging applications

Autor: Andresen, Bjørn F., Fulop, Gabor F., Hanson, Charles M., Miller, John L., Norton, Paul R., Gray, Nathan W., Prax, Andrew, Johnson, Daniel, Demke, Jonathan, Bolke, Joseph G., Alexander, W. B.
Zdroj: Proceedings of SPIE; May 2016, Vol. 9819 Issue: 1 p981914-981914-11
Databáze: Supplemental Index