Optical attachment for spatial transformation of excimer laser beam
| Autor: | Glebov, Alexei L., Leisher, Paul O., Zhevlakov, Aleksandr, Grishkanich, Alexsandr, Kascheev, Sergey, Kujanpää, Veli, Savinainen, Timo, Gavrilov, Egor |
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| Zdroj: | Proceedings of SPIE; March 2016, Vol. 9730 Issue: 1 p97301B-97301B-6, 875716p |
| Databáze: | Supplemental Index |
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