Process control of MOCVD growth for LEDs by in-situ photoluminescence
| Autor: | Jeon, Heonsu, Tu, Li-Wei, Krames, Michael R., Strassburg, Martin, Prall, C., Haberland, K., Kaspari, C., Brunner, F., Weyers, M., Rueter, D. |
|---|---|
| Zdroj: | Proceedings of SPIE; March 2016, Vol. 9768 Issue: 1 p97681A-97681A-7, 879137p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|