Hybrid enabled thin film metrology using XPS and optical
Autor: | Sanchez, Martha I., Ukraintsev, Vladimir A., Vaid, Alok, Iddawela, Givantha, Mahendrakar, Sridhar, Lenahan, Michael, Hossain, Mainul, Timoney, Padraig, Bello, Abner F., Bozdog, Cornel, Pois, Heath, Lee, Wei Ti, Klare, Mark, Kwan, Michael, Kang, Byung Cheol, Isbester, Paul, Sendelbach, Matthew, Yellai, Naren, Dasari, Prasad, Larson, Tom |
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Zdroj: | Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97780M-97780M-11, 9680232p |
Databáze: | Supplemental Index |
Externí odkaz: |