Non-contact distance measurement and profilometry using thermal near-field radiation towards a high resolution inspection and metrology solution
| Autor: | Sanchez, Martha I., Ukraintsev, Vladimir A., Bijster, Roy, Sadeghian, Hamed, van Keulen, Fred |
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| Zdroj: | Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97780H-97780H-10, 9680231p |
| Databáze: | Supplemental Index |
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