Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control
| Autor: | Sanchez, Martha I., Ukraintsev, Vladimir A., Gunay-Demirkol, Anil, Altamirano Sanchez, Efrain, Heraud, Stephane, Godny, Stephane, Charley, Anne-Laure, Leray, Philippe, Urenski, Ronen, Cohen, Oded, Turovets, Igor, Wolfling, Shay |
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| Zdroj: | Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p977807-977807-12 |
| Databáze: | Supplemental Index |
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