Contact/Via placement management for N7 logic and beyond
| Autor: | Hohle, Christoph K., Younkin, Todd R., Oyama, Kenichi, Hara, Arisa, Koike, Kyohei, Yamato, Masatoshi, Yamauchi, Shohei, Natori, Sakurako, Yaegashi, Hidetami |
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| Zdroj: | Proceedings of SPIE; March 2016, Vol. 9779 Issue: 1 p97790M-97790M-9, 880120p |
| Databáze: | Supplemental Index |
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