Three-Dimensional Nanostructure Construction via Nanografting:  Positive and Negative Pattern Transfer

Autor: Liu, J.-F., Cruchon-Dupeyrat, S., Garno, J. C., Frommer, J., Liu, G.-Y.
Zdroj: Nano Letters; September 2002, Vol. 2 Issue: 9 p937-940, 4p
Abstrakt: Three-dimensional nanostructures can be constructed using scanning probe lithography in combination with selective surface reactions. This letter introduces a successful approach using AFM-based nanografting to produce two-dimensional nanopatterns within self-assembled monolayer resists. These nanopatterns serve as an anchor to construct nanostructures in the third dimension via surface reactions. In this way, the nanometer-scale 2D pattern is transferred to chemically distinct 3D nanostructures. This approach offers the advantages of high spatial precision and selectivity in pattern transfer.
Databáze: Supplemental Index