Model-based phase-shifting interferometer

Autor: Bentley, Julie L., Stoebenau, Sebastian, Liu, Dong, Zhang, Lei, Shi, Tu, Yang, Yongying, Chong, Shiyao, Miao, Liang, Huang, Wei, Shen, Yibing, Bai, Jian
Zdroj: Proceedings of SPIE; October 2015, Vol. 9633 Issue: 1 p96331R-96331R-10, 9536780p
Databáze: Supplemental Index