Modeling and simulation of blazed grating based on MEMS scanning micro-mirror for NIR micro-spectrometer
| Autor: | Liu, Shenggang, Zhuang, Songlin, Petelin, Michael I., Xiang, Libin, Zhou, Ying, Wen, Zhiyu, Yang, Tingyan, Lei, Hongjie |
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| Zdroj: | Proceedings of SPIE; November 2015, Vol. 9795 Issue: 1 p97952P-97952P-6, 881575p |
| Databáze: | Supplemental Index |
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