Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam–sensitive glass

Autor: Gimkiewicz, Christiane, Hagedorn, Detlev, Jahns, Jürgen, Kley, Ernst-Bernhard, Thoma, Frank
Zdroj: Applied Optics; May 1999, Vol. 38 Issue: 14 p2986-2990, 5p
Abstrakt: For an integrated free-space optical interconnection system we suggest the use of microprisms to achieve large coupling angles at low loss. Prisms were fabricated in photoresist and quartz glass by analog lithography. High-energy-beam–sensitive glass was used as the gray-tone mask. Optical testing of the prisms shows acceptable surface quality and high efficiency (95%).
Databáze: Supplemental Index