| Autor: |
Burcham, Kevin E., Boyd, Joseph T. |
| Zdroj: |
Applied Optics; December 1998, Vol. 37 Issue: 36 p8397-8399, 3p |
| Abstrakt: |
Freestanding, multimode optical channel waveguides formed by micromachining silicon are demonstrated. Fabrication utilizes standard microelectromechanical systems (MEMS) technology. Losses in the 0.57–0.80-dB/cm range are measured for channel waveguides with an air–silicon–air structure, whereas losses in the 1.12–1.52-dB/cm range are measured for channel waveguides with a SiO_2–silicon–SiO_2 structure. Freestanding channel waveguides, along with optical fibers and other MEMS structures, can readily be mounted on a silicon MEMS platform to provide optimal alignment for maximizing optical coupling, and they are thus expected to be useful in devices that involve light and MEMS structures. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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