Carbon/titanium multilayers as soft-x-ray mirrors for the water window

Autor: Stock, Hans-Juergen, Haindl, Gabriele, Hamelmann, Frank, Menke, Detlef, Wehmeyer, Oliver, Kleineberg, Ulf, Heinzmann, Ulrich, Bulicke, Peter, Fuchs, Detlev, Ulm, Gerhard
Zdroj: Applied Optics; September 1998, Vol. 37 Issue: 25 p6002-6005, 4p
Abstrakt: C/Ti multilayers with a period thickness of 2.1–2.7 nm were produced by electron-beam evaporation in ultrahigh vacuum as soft-x-ray mirrors in the water window (λ = 2.3–4.4 nm). For smoothing the individual interfaces and thus enhancing the total reflectance, each layer was ion polished with an Ar^+ ion beam after deposition. For a multilayer of 85 bilayers, a reflectance of approximately 11% at an angle of incidence of 59° (with respect to the surface normal) by use of s-polarized radiation at a wavelength of 2.77 nm was achieved.
Databáze: Supplemental Index