Micro-Hole Diameter Inspection Using Audible Sound

Autor: Nagasu, Yoshinori, Nakayama, Noboru, Otani, Makoto, Itoh, Kazunori, Oguchi, Keigo, Eguchi, Kakumasa
Zdroj: Key Engineering Materials; July 2015, Vol. 656 Issue: 1 p755-760, 6p
Abstrakt: This paper presents a method for inspecting micro-holes with diameters of less than 100 μm using audible sound. The inspection system measures the micro-hole diameter by comparing two sound signals. Fluid flow through micro-holes affects the performance of products such as CO gas sensor parts, microphone filters and fuel injection plates. Therefore, if the flow rate of fluid passing through micro-holes is accurately assessed by an inspection system, the performance of a product can be guaranteed.
Databáze: Supplemental Index