Quantifying height of machined steps on copper disk using Fourier domain short coherence interferometer
| Autor: | Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Montonen, Risto, Kassamakov, Ivan, Hæggström, Edward, Österberg, Kenneth |
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| Zdroj: | Proceedings of SPIE; May 2015, Vol. 9525 Issue: 1 p95253L-95253L-7, 857285p |
| Databáze: | Supplemental Index |
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