Atomic layer deposition of Al2O3on NF3-pre-treated graphene
| Autor: | Tiginyanu, Ion M., Junige, Marcel, Oddoy, Tim, Yakimova, Rositsa, Darakchieva, Vanya, Wenger, Christian, Lupina, Grzegorz, Kitzmann, Julia, Albert, Matthias, Bartha, Johann W. |
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| Zdroj: | Proceedings of SPIE; June 2015, Vol. 9519 Issue: 1 p951915-951915-9 |
| Databáze: | Supplemental Index |
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