Comb structure analysis of the capacitive sensitive element in MEMS-accelerometer
| Autor: | George, Thomas, Dutta, Achyut K., Islam, M. Saif, Shalimov, Andrew, Timoshenkov, Sergey, Korobova, Natalia, Golovinskiy, Maxim, Timoshenkov, Alexey, Zuev, Egor, Berezueva, Svetlana, Kosolapov, Andrey |
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| Zdroj: | Proceedings of SPIE; May 2015, Vol. 9467 Issue: 1 p94672W-94672W-9, 852058p |
| Databáze: | Supplemental Index |
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