Improved scatterometry time-to-solution using virtual reference
| Autor: | Cain, Jason P., Sanchez, Martha I., Vaid, Alok, Iddawela, Givantha, Tsai, Jamie, Wainreb, Gilad, Isbester, Paul, Kang, Byung Cheol (Charles), Klots, Michael, Katz, Yinon, Bozdog, Cornel, Sendelbach, Matt |
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| Zdroj: | Proceedings of SPIE; March 2015, Vol. 9424 Issue: 1 p94240X-94240X-9, 848170p |
| Databáze: | Supplemental Index |
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