High-speed AFM for 1x node metrology and inspection: Does it damage the features?
| Autor: | Cain, Jason P., Sanchez, Martha I., Sadeghian, Hamed, van den Dool, Teun C., Uziel, Yoram, Bar Or, Ron |
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| Zdroj: | Proceedings of SPIE; March 2015, Vol. 9424 Issue: 1 p94240Q-94240Q-10, 9329771p |
| Databáze: | Supplemental Index |
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