Toward high-performance quality meeting IC device manufacturing requirements with AZ SMART DSA process
| Autor: | Resnick, Douglas J., Bencher, Christopher, Kim, JiHoon, Yin, Jian, Cao, Yi, Her, YoungJun, Petermann, Claire, Wu, Hengpeng, Shan, Jianhui, Tsutsumi, Tomohiko, Lin, Guanyang |
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| Zdroj: | Proceedings of SPIE; March 2015, Vol. 9423 Issue: 1 p94230R-94230R-17, 9328788p |
| Databáze: | Supplemental Index |
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