Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow
| Autor: | Resnick, Douglas J., Bencher, Christopher, Pathangi, Hari, Chan, Boon Teik, Bayana, Hareen, Vandenbroeck, Nadia, Van Den Heuvel, Dieter, Van Look, Lieve, Rincon-Delgadillo, Paulina, Cao, Yi, Kim, JiHoon, Lin, Guanyang, Parnell, Doni, Nafus, Kathleen, Harukawa, Ryota, Chikashi, Ito, Nagaswami, Venkat, D'Urzo, Lucia, Gronheid, Roel, Nealey, Paul |
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| Zdroj: | Proceedings of SPIE; March 2015, Vol. 9423 Issue: 1 p94230M-94230M-15, 9328786p |
| Databáze: | Supplemental Index |
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