Negative-tone imaging with EUV exposure for 14nm hp and beyond
| Autor: | Wood, Obert R., Panning, Eric M., Tsubaki, Hideaki, Nihashi, Wataru, Tsuchihashi, Toru, Fujimori, Toru, Momota, Makoto, Goto, Takahiro |
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| Zdroj: | Proceedings of SPIE; March 2015, Vol. 9422 Issue: 1 p94220N-94220N-12, 9327793p |
| Databáze: | Supplemental Index |
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