An improved PSO algorithm and its application on model identification of coarse-stage in lithography machine
| Autor: | Cui, Junning, Tan, Jiubin, Wen, Xianfang, Liu, Yang, Liu, Fazhi, Wei, Kai, Fu, Zhenxian |
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| Zdroj: | Proceedings of SPIE; February 2015, Vol. 9446 Issue: 1 p94464U-94464U-6, 850183p |
| Databáze: | Supplemental Index |
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