Passive protective strategy for ultra-precision dual-stage
| Autor: | Cui, Junning, Tan, Jiubin, Wen, Xianfang, Liu, Yang, Chen, Zhenyu, Fu, Zhenxian |
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| Zdroj: | Proceedings of SPIE; February 2015, Vol. 9446 Issue: 1 p94464X-94464X-6, 850183p |
| Databáze: | Supplemental Index |
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